450 mm Wireless Wafer Processing Metrology Sensors Support Next-Generation of Semiconductor Production Processes
CyberOptics Semiconductor offers a line of wireless 450 mm wafer processing metrology sensors to help chipmakers and tool manufacturers qualify next-generation semiconductor production processes.
- (1888PressRelease) October 11, 2011 - CyberOptics' 450 mm carbon fiber WaferSense® sensors are designed to obtain precise metrology data to optimize new processing equipment for shrinking 32 nm and 22 nm process tolerances, according to Craig C. Ramsey, Ph.D., CyberOptics Semiconductor's general manager.
CyberOptics' 450 mm sensors allow engineers to level processing equipment, reduce equipment vibration and set three axis wafer-transfer coordinates. Each wafer-like device follows the processing life of a wafer and reports real-time metrology data via a GUI.
The company's line of 450 mm metrology devices is available by special order: the Auto Teaching System (ATS450), Auto Vibration System (AVS450) and Auto Leveling System 2 Vertical (ALS2V450).
Engineers can implement CyberOptics' WaferSense sensors to optimize equipment and tools used to perform processes across the fab: photolithography; etch; diffusion; thin film; implant; metallization; chemical mechanical planarization (CMP) and fab automation.
Detailed information on CyberOptics' WaferSense productsis available online at http://www.cyberopticssemi.com/products or by contacting sales at (503) 495-2200 for more information.
About CyberOptics Semiconductor, Inc.
CyberOptics Semiconductor develops automated products that seamlessly measure critical parameters in semiconductor fabrication processes and equipment. The company's pioneering WaferSense® line includes wireless metrology devices for vibration, leveling, gapping, teaching and sensing airborne particles in semiconductor process equipment. The company is the largest producer of reflective wafermapping sensors and a leading provider of frame grabber machine vision boards under its HAMA Sensors™ and Imagenation™ brands. CyberOptics Semiconductor is a subsidiary of CyberOptics Corp. (Nasdaq:CYBE), one of the world's leading providers of process yield and throughput improvement solutions for the electronic assembly and semiconductor fabrication industries. For information, visit http://www.cyberopticssemi.com/, e-mail CSsales ( @ ) cyberoptics dot com or call 800-366-9131 dot
Contacts:
CyberOptics Semiconductor, Inc.
Lindsey Dietz
503.495.2217
ldietz ( @ ) cyberoptics dot com
http://www.cyberopticssemi.com /
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